Determination of Stress Fields and Identification of Thermomechanical Parameters in a Thermally Grown Oxide under Thermal Cycling Loadings, Using Advanced Models

Abstract

The presence of residual stresses in thermal oxide layers has been recognized for a long time. In the present work, the mechanical fields for chromium oxide are investigated. An extended model is established to take into account the effects of temperature and thermal cycling for the calculation of oxide stress. Numerical results are given in order to predict the influence of different parameters, especially the dependence of some material parameters with temperature. This enables to make comparison with experimental results.