Investigation of Thermal Properties of Thin Semiconductor Layers Deposited on a Glass Substrate by the Photothermal Deflection Technique

Abstract

In this work we describe a method based on the Photothermal Deflection Technique adapted for the determination of thermal properties of thin semiconductor layers deposited on a glass substrate. The sample placed in air is heated thanks a modulated pump uniform beam coming from a halogen lamp. The thermal conductivity and the thermal diffusivity are obtained by comparing the amplitude and phase variations versus square root modulation frequency between the experimental curves and the corresponding theoretical ones. The best coincidence permits to deduce the thermal properties of the sample.