Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations-Reference-Cited by-同舟云学术

Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations

Published:2010-05 Issue: Volume:437 Page:51-55
ISSN:1662-9795
Container-title:Key Engineering Materials
language:
Short-container-title:KEM

Author:

Sysoev Evgeny V.¹

Affiliation:

1. Siberian Branch of Russian Academy of Sciences (SB RAS)

Abstract

Chromatic aberrations in white-light interferometer can dramatically increase measurement nanorelief errors. It is shown that these errors can be more than 70 nm. They are result of changing effective wavelength within the measurement field. We have proposed the method for error calculation using measurement data and then their correction experimentally up to 10 nm.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://www.scientific.net/KEM.437.51.pdf

Reference10 articles.

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