Growth of Device Quality 4H-SiC High Velocity Epitaxy
Author:
Affiliation:
1. Linköping University
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
https://www.scientific.net/MSF.457-460.201.pdf
Reference3 articles.
1. O. Kordina, K. Irvine, J. Sumakeries, H.S. Kong, M.J. Paisley and C.H. Carter, Jr.: Mater. Sci. Forum Vol. 264-268 (1998), p.107.
2. M. Syväjärvi, R. Yakimova, H. Jacobsson, M.K. Linnarsson, A. Henry and E. Janzén: Mater. Sci. Forum Vol. 338-342 (2000), p.165.
3. M. Syväjärvi, R. Yakimova, H. Jacobsson, and E. Janzén: J. Appl. Phys. Vol. 88 (2000), p.1407.
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