2-Phase Precision Alignment Visual Feedback Control System

Author:

Wen Chih Chin1,Lin Shi Wei1

Affiliation:

1. Metal Industries Research and Development Centre

Abstract

This paper introduces an alignment method using machine vision feedback control method. A panel is placed on a XXY table and its posture is inspected by image sensors with a frame grabber. The alignment of the panel is corrected by adjusting its positions until the amount of misalignment converges into a small tolerance error. Two-phase control process is also derived with this image acquisition design. Applying this proposed control method, long distance moving requirement and better alignment precision performance request can be also guaranteed. Experimental results are shown to demonstrate the feasibility of this alignment control system.

Publisher

Trans Tech Publications, Ltd.

Reference6 articles.

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3. S. Kwoon and J. Hwang: Kinematics, pattern recognition, and motion control of mask-panel alignment system, Control Engineerin Pratice, Vol. 19, (2011) 883–892.

4. M. -F. Chen: A fast positioning method with patten tracking for automatic wafer alignment, 3rd Internatinal Congress on Image and Signal Processing, (2010).

5. K. -B. Choi: Kinematic analysis and optimal design of 3-PPR planar parallel manipulator, Journal of Mechanical Science and Technology, Vol. 17, No. 4, (2003) 528-537.

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