Interconnecting Silicon Posts by Pyrolyzing Diffraction-Induced SU-8 Fibers

Abstract

Silicon postsare fabricated by inductively coupled plasmaetching (ICP). Then, a SU-8 layer is spin-coated. During the photolithography, the opening areas of mask are aligned to the top surface of the underlying silicon posts.SU-8 fibers that interconnect the underlying silicon postsare created due to the mask-induced diffraction effect. After pyrolysis, SU-8 photoresist is transformedinto carbon, and as the results, carbon fibers that interconnect the underlying silicon postsare created.