Influence of Substrate on Soft Magnetic Properties of Fe-Co-Si/Native Oxide Multilayer Films

Abstract

The [Fe-Co-Si (d)/native oxid50multilayer films were deposited on Kapton substrate and glass substrate by DC magnetron sputtering. The effect of substrate on magnetic and electric properties of the multilayer films was investigated. Compared to the films on glass substrates, higher coercivity, larger uniaxial-anisotropy field were achieved for the flexible films. The values of the resistivities for the flexible films are of the order of 10 mΩcm, which is two orders higher than the value of 0.1 mΩcm for the multilayer films on glass substrates. Furthermore, higher frwas found in the flexible films. It is believed that the [Fe-Co-Si (d)/native oxide]50multilayer films on flexible substrates can find its wide applications at high frequency for various purposes.