Affiliation:
1. Centre for Ferroics, University of Cambridge
2. Samco Inc.
Abstract
A review is given of "misted" CSD deposition. This technique uses stoichiometrically
correct sol-gel solutions but is not a spin-on process. Instead a monodisperse mist of droplets as
large as 3 microns in diameter or as small as 0.3 microns is deposited on a substrate. This
technique has the great advantage over sol-gel spin-on processing in that it is suitable for nonplanar
structures, including nanotubes and nano-wires. One could coat a variety of objects with this
technique, including anything from non-planar flash-goggles to a parabolic mirror or focal-plane
array of pyroelectric detectors. Yet it is much simpler and less expensive than conventional
chemical vapour deposition (CVD). We illustrate its use with functionally graded layers on
platinised silicon wafers, on nanotubes of piezoelectrics, and most recently [Pollard, Gregg, et al.]
on 100 Gbit/cm2 arrays of Pt nanowires on Si substrates (the latter are 30-nm diameter, spaced 50
nm apart, embedded in porous alumina and capped with lead zirconate titanate capacitors).
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference9 articles.
1. L. D. McMillan, C. A. Paz de Araujo, T. Roberts, J. Cuchiaro, M. C. Scott, and J. F. Scott, Integrated Ferroelec. 2, 351 (1992).
2. M. Huffman, Integrated Ferroelec. 10, 39 (1995).
3. N. Solayappan, G. F. Derbenwick, L. D. McMillan, C. A. Araujo, and S. Hayashi, Integrated Ferroelec. 14, 237 (1997); N. Solyappan, L. D. McMillan, C. A. Paz de Araujo, and B. Grant, Integrated Ferroelec. 18, 127 (1997).
4. F. D. Morrison, Laura Ramsay, and J. F. Scott, J. Phys. Condens. Mat. 15, L527 (2003).
5. Ru-DER is 2, 4-dimethyl penta-dienyl(ethyl cyclopentadienyl) ruthenium.
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