Affiliation:
1. Tsinghua University
2. Beijing Sinoma Research Institute of Synthetic Crystals
3. China University of Geosciences
Abstract
In this paper, particular CVD processes of so-called Se method with solid substances as starting
materials was investigated to fabricate ZnSe. On the basis of detailed experimental researches, the growth
model and dominant regime of deposition rate were discussed. ZnSe of high optical properties was
produced under optimized process conditions. The grain size of CVD ZnSe by Se method is less than
10μm, and its average transmittance in the wavelength range of 0.55~20μm is up to 70%.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
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