Affiliation:
1. Dalian F. T. Z. CREDIT
Abstract
A method for detecting impurities in high purity BCl3 was described in the present work. GC, ICP-MS, FTIR and colorimetric method were applied to analyze high-purity BCl3. The quantitative results of the impurities such as N2, CO, CO2 and Fe demonstrated that these methods had excellent repeatability (RSD<3%), reproducibility. The ICP-MS detection accuracy can achieve ppb limiter. The FTIR method provided opportunities for the determination of HCl, COCl2, which have difficulties in quantification with other method.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference4 articles.
1. Liu Yun gai, Yang Yixiu, Zhang Jie, Wang Ling. Analytical chemistry, 1984, 12 (8), 763-765.
2. Impurities in BCl3 and Boron Trifluoride Determined by Fourier Transform Mass spectrometry [J]. Anal. Chem, 1986, 58. 2797 – 2800.
3. Emei institute of semiconductors, double GC test trichlorosilane in talking about the measurement method of the study, (1984).
4. Trichlorosilane in the measurement method of the research, the second national non-ferrous metal gas analysis data, (1986).