Affiliation:
1. National Institute of Advanced Industrial Science and Technology
Abstract
Aluminum nitride (AlN) is a promising Acoustic Emission (AE) sensor element for
high-temperature environments such as gas turbines and other plants because AlN maintains its
piezoelectricity up to 1200°C. Highly c-axis-oriented AlN thin-film sensor elements were prepared
on silicon single crystals by rf magnetron sputtering. Both ordinary-temperature AE sensors and
high-temperature AE sensors have been developed using these elements. In this paper, to study effects
of d33 and thickness of AlN elements on sensor sensitivity, AlN elements with d33 from 2 to 7 pm/V
and thickness from 3 to 9 /m were prepared. It is confirmed that the AE sensor sensitivity increased
with d33 and thickness of AlN elements. The sensitivity of the high-temperature AE sensor was also
improved by a design of the sensor structure. The sensor characteristics were evaluated at elevated
temperatures from 200 to 600°C. It was confirmed that the AE sensor works well at 600°C and does
not deteriorate.
Publisher
Trans Tech Publications, Ltd.
Cited by
10 articles.
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