Affiliation:
1. CEMES
2. KTH, Royal Institute of Technology
3. Université François Rabelais
Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics
Cited by
12 articles.
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1. Defects in Ultra-Shallow Junctions;Defects in Microelectronic Materials and Devices;2008-11-19
2. Ostwald ripening of interstitial-type dislocation loops in 4H-silicon carbide;Journal of Applied Physics;2006-09
3. Effect of implant temperature on secondary defects created by MeV Sn implantation in silicon;Journal of Applied Physics;2001-03
4. Defect structure of erbium-doped silicon layers formed by solid phase epitaxy;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-01
5. Silicon: Defect Evolution;Encyclopedia of Materials: Science and Technology;2001