Analysis of an Electrostatic Micro-Actuator Based on Vertically-Horizontally Bending

Abstract

For the problems of the oversized voltage and undersized displacement in the electrostatic micro actuator of transverse loading recently, a silicon micro actuator model with characteristics of large-displacement and low-voltage is presented based on the principle of vertically-horizontally bending. The deflection equation of the micro actuator is derived. The axial static electricity, temperature stress and axial squeezing pressure on the deformation of micro-beam are analyzed. The simulation shows that the displacement is as big as 17.5μm when the driving voltage is as low as 5V. The displacement is much larger than the deformation of the current micro actuator.