Modeling of I-, T- and V-Shaped Microcantilevers for Environmental Monitoring

Author:

Nuryadi Ratno1

Affiliation:

1. Agency of the Assessment and Application of Technology

Abstract

This paper describes a model of microcantilever to determine the optimal dimensions that can be used for environmental monitoring. Three types, which are usually used i.e., I-, T- and V-shaped microcantilevers, are considered. The microcantilevers work in dynamic mode in which their resonance frequencies depend on both spring constant and effective mass. It can be seen that the spring constant and effective mass of the microcantilever change when the structure is changed even the size is same. In consequent, the sensor sensitivity is also found to be different each other. The V-shaped microcantilever is more sensitive than I- and T-shaped ones. Moreover, the simulation results show that the microcantilever with sizes of length 10 µm, width 5 µm and thickness 100 nm is good enough to detect molecule gas with the mass of less than femtogram.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors;Sensors;2024-04-05

2. Developing A Portable Electrothermal Microcantilever Read-out System;2023 International Conference on Radar, Antenna, Microwave, Electronics, and Telecommunications (ICRAMET);2023-11-15

3. Observation of chemicals evaporation (ethanol, methanol and 2-propanol) using vibrated microcantilever;THE 2ND SCIENCE AND MATHEMATICS INTERNATIONAL CONFERENCE (SMIC 2020): Transforming Research and Education of Science and Mathematics in the Digital Age;2021

4. Influence of water vapor on CO detection using a resonant microcantilever functionalized by Al-doped ZnO nanorods;Japanese Journal of Applied Physics;2019-03-27

5. Gas Sensing Using Static and Dynamic Modes Piezoresistive Microcantilever;Advanced Materials Research;2014-02

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