Fabrication of Polymer Optical Waveguides for the 1.5-μm Band Using Focused Proton Beam-Reference-Cited by-同舟云学术

Fabrication of Polymer Optical Waveguides for the 1.5-μm Band Using Focused Proton Beam

Published:2011-12 Issue: Volume:497 Page:147-150
ISSN:1662-9795
Container-title:Key Engineering Materials
language:
Short-container-title:KEM

Author:

Miura Kenta¹,Machida Yuki¹,Uehara Masato¹,Kiryu Hiromu¹,Ozawa Yusuke¹,Sasaki Tomoyuki¹,Hanaizumi Osamu¹,Satoh Takahiro²,Ishii Yasuyuki²,Kohka Masashi²,Takano Katsuyoshi³,Ohkubo Takeru²,Yamazaki Akiyoshi²,Kada Wataru²,Yokoyama Akihito²,Kamiya Tomihiro²,Nishikawa Hiroyuki⁴

Affiliation:

1. Gunma University

2. Japan Atomic Energy Agency

3. Japan Atomic Energy Research Institute

4. Shibaura Institute of Technology

Abstract

Proton beam writing (PBW) has attracted much attention recently as a next-generation micro-fabrication technology. It is a direct-drawing technique and does not need any masks to transfer micro-patterns to sample surfaces. In addition, the refractive index of a poly (methyl methacrylate) (PMMA) can be increased by proton-beam irradiation. In this study, we fabricated the first 1.5-μm-band single-mode, straight-line waveguides and Y-junction waveguides consisting of PMMA layers using the PBW technique.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://www.scientific.net/KEM.497.147.pdf

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