A Differential Capacitive Accelerometer with Four Folded Springs and Changeable Area

Abstract

A differential capacitive accelerometer with four folded springs and changeable area was designed and fabricated. It was composed of upper electrode(proof mass), four folded springs、lower comb electrode. Modal and statics were analyzed by ANSYS, accelerometer was fabricated by bond and ICP etching technology. Detection circuit was fabricated and the test was completed. The maximum measured acceleration is 12g, sensitivity is 86mV/g, and precision is higher than ±4.5%.