Affiliation:
1. Eastern Liaoning University
2. Eastern Liaodong University
3. Liaoning Jidian Polytechnic
Abstract
Effects of the magnetic field on confinement of the coaxial twined ECR plasmas were studied using the Lanmuir probe diagnostic technique. Under the magnetic-mirror confinement, the plasma density was quite high in the vicinity of the axis of the ECR sources but it decreased rapidly with increasing radial distance; while under the cusped field confinement, the density was lower but uniform. The trend was similar for the electron temperature and the plasma potential. This property may be utilized in materials processes to meet different requirements. Key words: Electron cyclotron resonance (ECR), Plasma, Magnetic confinement, The cusped field confinement.PACS: 52.80.Pi, 52.55.-s, 52.70.-m
Publisher
Trans Tech Publications, Ltd.
Reference14 articles.
1. Suzuki K, Okudaira S, Sakudo N and Kanomato I 1977 Jpn. J. Appl. Phys. 16 (1979).
2. Bardos L, Longar G, Stoll I, Musil J and Zacek F 1975 J. Phys. D: Appl. Phys. 8 L195.
3. Shapoval S Y, Petrashov V T, Popov O A, Yoder M D, Maciel P and Lok C K C 1991 J. Vat. Sci. Technol. A 9 3071.
4. Li X, Tang J A, Ma G J, Wu Z M, Deng X L 2005 Chin. Phys. Lett. 20 692.
5. Liu T W, Deng X L, Wang X Y, Wang Y M, Zou J X, Dong C 2004 Chin. Phys. Lett. 21 (2008).