Temperature Compensation Experiment of Love Wave Sensor

Abstract

Love wave sensor is one of the most promising SAW sensors for liquid detection, because of acoustic energy can be confined in sensing surface by waveguide layer of Love wave sensor, which resulted in higher sensitivity to surface perturbations. Temperature coefficient of frequency (TCF) has deep effect on effective sensitivity of Love wave sensor. In order to improve the performance of Love wave sensor, the theoretical relationship of TCF on substrates and guiding layers temperature properties is researched. It found that reasonable combinations of substrates and guiding layers was a feasible method to obtain effective temperature compensation, and experimental TCF of sensitive element is reduced to 0.75ppm/°C by this method.