Confirmation of the Growth Mechanism of the Buffer Layer in Epitaxial Graphene on SiC

Author:

Prudkovskiy Vladimir S.1ORCID,Templier Roselyne1,Moulin Alexandre1,Troutot Nicolas1,Gelineau Guillaume1,Huet Stéphanie1,Le Van-Hoan1,Mony Karine2,Lapertot Gérard2,Delcroix Mathieu1,Caridroit Simon1,Barbet Sophie1,Widiez Julie1

Affiliation:

1. CEA-Leti

2. Univ. Grenoble Alpes

Abstract

This study substantiates the epigraphene formation theory on SiC, presenting it as freestanding graphene during thermal decomposition epitaxy. It was found that cool down process is responsible for the formation of the graphene buffer layer. Additionally the capping capabilities of the buffer layer have been evaluated using Raman spectroscopy and AFM measurements.

Publisher

Trans Tech Publications, Ltd.

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