A high-performance oscillator based on RF MEMS resonator and low-noise sustaining circuit for timing applications
Author:
Affiliation:
1. Jiangsu Key Laboratory of ASIC Design, Nantong University
2. Institute of Semiconductors, Chinese Academy of Sciences
3. University of Chinese Academy of Sciences
4. State Key Laboratory of Transducer Technology
Publisher
Institute of Electronics, Information and Communications Engineers (IEICE)
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://www.jstage.jst.go.jp/article/elex/15/10/15_15.20180395/_pdf
Reference11 articles.
1. [1] S. Roy, et al.: “Designing a new high gain CMOS amplifier towards a 17.22 MHz MEMS based Si oscillator for a cost effective clock generator IC,” IEICE Electron. Express 12 (2015) 20150272 (DOI: 10.1587/elex.12.20150272).
2. [2] T. Manzaneque, et al.: “Piezoelectric MEMS resonator-based oscillator for density and viscosity sensing,” Sens. Actuators A Phys. 220 (2014) 305 (DOI: 10.1016/j.sna.2014.10.002).
3. [3] L. He, et al.: “A CMOS readout circuit for SOI resonant accelerometer with 4-µg bias stability and 20-µg/Hz1/2 resolution,” IEEE J. Solid-State Circuits 43 (2008) 1480 (DOI: 10.1109/JSSC.2008.923616).
4. [4] J. Xie, et al.: “Reliable low-cost fabrication and characterization methods for micromechanical disk resonators,” Transducers Dig. Tech. Papers (2011) 2462 (DOI: 10.1109/TRANSDUCERS.2011.5969692).
5. [5] Y. F. Liu, et al.: “An effective approach for restraining electrochemical corrosion of polycrystalline silicon caused by an HF-based solution and its application for mass production of MEMS devices,” J. Micromech. Microeng. 22 (2012) 035003 (DOI: 10.1088/0960-1317/22/3/035003).
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