Non-contact sub-nanometer displacement sensing based on optical digital coherent detection using frequency-domain filters
Author:
Affiliation:
1. School of Mechanical and Electrical Engineering, Sanming University
Publisher
Institute of Electronics, Information and Communications Engineers (IEICE)
Link
https://www.jstage.jst.go.jp/article/elex/21/9/21_21.20240089/_pdf
Reference30 articles.
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