Time-of-Flight Secondary Ion Mass Spectroscopy with Bismuth Primary Ions of Clean and Air-Exposed Surfaces of Tellurium

Author:

Trzyna Malgorzata1,Berchenko Nicolas1,Rading Derk2,Cebulski Jozef3

Affiliation:

1. Center for Microelectronics and Nanotechnology, Rzeszow University, Rejtana 16A, Rzeszow 35-959, Poland

2. ION-TOF GmbH, Heisenberg str. 15, Muenster, 48149, Germany

3. Center for Innovation and Transfer of Natural Sciences and Engineering Knowledge, Rzeszow University, Rejtana 16A, Rzeszow 35-959, Poland

Abstract

The regularity of Bi+, Bi3+ and Bi3++ primary ions in the time-of-flight secondary ion mass spectroscopy fragment pattern of air oxidized Te and Bi+ direct-current scan cleaned Te is discussed. The most intensive fragments for a cleaned Te surface are positive and negative Te x and BiTe x clusters. The sequence of secondary ion cluster formation is Bi-Te alloying followed by sputtering and ionization. For oxidized Te the chemical composition of the produced Te xO y fragments satisfies the relation y = 2 x for positive fragments and y = 2 x + 1 for negative ones. Experimental findings are in a good agreement with the results predicted by Plog's model for TeO2.

Publisher

SAGE Publications

Subject

Spectroscopy,Atomic and Molecular Physics, and Optics,General Medicine

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