Structures of Inclusions of Impurity Nickel Atoms in Silicon Monocrystals

Abstract

Morphological parameters of microinclusions and nanoinclusions of impurity nickel atoms in silicon are studied by electron probe microscope. The dependence of the structural constructions of impurity clusters on their size and shape was studied. Quantitative indicators of the distribution of the atoms of the main and technological impurities over the volume of impurity clusters are established.