Non-destructive initial-profile-free depth profile evaluation of thin-film sample using angle-resolved X-ray photoelectron spectroscopy and profile smoothing regularization-Reference-Cited by-同舟云学术

Non-destructive initial-profile-free depth profile evaluation of thin-film sample using angle-resolved X-ray photoelectron spectroscopy and profile smoothing regularization

Published:2021-09-17 Issue:10 Volume:60 Page:101003
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Hoshina Yutaka,Tokuda Kazuya,Saito Yoshihiro

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

https://iopscience.iop.org/article/10.35848/1347-4065/ac1fba/pdf

Reference10 articles.

1. The determination of depth profiles from angle-dependent XPS using maximum entropy data analysis

2. Profiling nitrogen in ultrathin silicon oxynitrides with angle-resolved x-ray photoelectron spectroscopy

3. Thin films and interfaces in microelectronics: composition and chemistry as function of depth

4. XPS and angle resolved XPS, in the semiconductor industry: Characterization and metrology control of ultra-thin films

5. Non-destructive depth profile reconstruction of single-layer graphene using angle-resolved X-ray photoelectron spectroscopy

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1. Nondestructive initial-profile-free 3D elemental mapping in multilayer thin film structures based on EDX and a quadratic programming problem;Microscopy;2023-08-03

2. Non-destructive depth profile evaluation of multi-layer thin film stack using simultaneous analysis of data from multiple X-ray photoelectron spectroscopy instruments;Japanese Journal of Applied Physics;2022-03-16