Author:
Gong Shanshan,Qiu Jinfeng,Li Mujun
Abstract
Abstract
Microlens arrays with diverse morphologies are difficult to be formed in one thermal reflow process as they require different process conditions. Here, we present a stable and universal method to overcome this challenge with polydimethylsiloxane assisted thermal reflow. By this method, different microlenses with spherical, aspheric and tilted asymmetric morphologies can be obtained under the same experimental conditions. All the microlens show good shape profiles and the surface roughness is about 1 nm. It demonstrates a facile and cost-effective method for fabricating versatile microlens arrays with controllable morphologies in a universal process.
Funder
National Natural Science Foundation of China
Scientific Research Foundation of Education Department of Anhui Province of China
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering