Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high-power pulsed magnetron sputtering of titanium
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
https://iopscience.iop.org/article/10.35848/1347-4065/ab71de/pdf
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2. Optical emission spectroscopy in deep oscillation magnetron sputtering (DOMS) of titanium;Japanese Journal of Applied Physics;2023-05-15
3. Time-of-flight mass spectrometry diagnostics in deep oscillation magnetron sputtering (DOMS) of titanium;Journal of Applied Physics;2022-06-28
4. Development of a Plasma Diagnostic Method for High Power Pulsed Magnetron Sputtering Using a Reflectron-Type Time-of-Flight Mass Spectrometer;Journal of the Mass Spectrometry Society of Japan;2022-03-01
5. Plasma wave after HIPIMS pulse: time-resolved diagnostic of HIPIMS copper plasma using a homemade Langmuir probe;Japanese Journal of Applied Physics;2021-12-15
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