S0-like SAW mode resonator on LiNbO3/SiO2/SiC structure

Abstract

Abstract This paper discusses the basic properties of a surface acoustic wave (SAW) mode like the zeroth-order symmetric (S0) Lamb mode in the LiNbO3/SiO2/SiC configuration in detail. At first, the influence of the SiO2 insertion is discussed, and it is shown that SiO2 insertion offers significant enhancement of the electromechanical coupling coefficient K 2 for the S0-like SAW mode without significant reduction of the phase velocity. Then, the discussion is extended to spurious resonance characteristics. It is shown that the dummy electrodes are not necessary in this case. Then, two kinds of piston design are applied for the transverse suppression, and their effectiveness is discussed.