Abstract
Abstract
A first-order (
S
1
) Lamb wave resonator (LWR) with a trapezoid grooves configuration on the top surface of the aluminum nitride membrane between interdigital electrodes is proposed in this paper. Both the simulation and experiment results demonstrate that the
k
e
f
f
2
can be enhanced with the depth of the trapezoid grooves increasing. Meanwhile, the spurious modes can be suppressed by the trapezoid grooves. A 75% improvement on the
k
e
f
f
2
has been achieved in a 2.45 GHz
S
1
mode LWR with trapezoid grooves with spurious modes free. The
k
e
f
f
2
reaches up to 5.47% without quality factor degradation.
Funder
National Key R&D Program of China
Key R & D program of Hubei Province
fundamental research funds for the central universities
Subject
General Physics and Astronomy,General Engineering
Cited by
4 articles.
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