Author:
Nguyen Bich-Yen,Celler George,Mazuré Carlos
Abstract
Classical scaling is no longer possible to follow Moore’s law. In addition to the material innovations such as high K/metal gate and stressors, a transition to SOI is essential to meet scaling and performancerequirements alike. The advances in SOI for fully depleted devices and some key SOI applications are described.
Publisher
Journal of Integrated Circuits and Systems
Subject
Electrical and Electronic Engineering
Cited by
22 articles.
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