Novel Projection Exposure System Using Gradient-Index Lens Array
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
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2. Application of projection lithography using a gradient-index lens array and wet etching to texturing for control of the hydrophobic properties of stainless-steel plates;Japanese Journal of Applied Physics;2019-05-06
3. Improvement of Patterning Homogeneity in a Field of Projection Exposure System Using a Gradient-Index Lens Array;Journal of Photopolymer Science and Technology;2017
4. Investigation into causes of resolution degradation in projection exposure using a gradient-index lens array;Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII;2015-07-09
5. Directional Difference of Patterns Printed by Scan-Projection Lithography Using a Gradient Index Lens Array;Japanese Journal of Applied Physics;2013-06-01
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