Experimental Study on Favorable Properties of Compound RF Discharge Plasmas with a Tapered Shape Hollow Cathode Compared with a Plane Cathode-Reference-Cited by-同舟云学术

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Experimental Study on Favorable Properties of Compound RF Discharge Plasmas with a Tapered Shape Hollow Cathode Compared with a Plane Cathode

Published:2006-11-08 Issue:11 Volume:45 Page:8883-8889
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Yambe Kiyoyuki,Matsuoka Akio,Kondoh Yoshiomi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of electrode gap on radio-frequency discharge characteristics with a hollow electrode;Physics of Plasmas;2020-12

2. Change of plasma propagation state due to force balance with collision;AIP Advances;2020-02-01

3. Plasma parameters of RF capacitively coupled discharge: comparative study between a plane cathode and a large hole dimensions multi-hollow cathode;The European Physical Journal Applied Physics;2019-01

4. Experimental Studies on Low-Pressure Plane-Parallel Hollow Cathode Discharges;Brazilian Journal of Physics;2018-05-30

5. RF magnetized ring-shaped plasma for target utilization obtained with circular magnet monopole arrangement;Japanese Journal of Applied Physics;2017-11-29

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