Modified Reflectance–Transmittance Method for the Metrology of Thin Film Optical Properties
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Published:2006-03-08
Issue:3A
Volume:45
Page:1566-1569
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Yeh Kwei-tin,Lin Chih-hung,Hu Ji-ren,Loong Wen-an
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering