Crystal Orientation and Nitrogen Effects on the Carrier Mobility of p-Type Metal Oxide Semiconductor Field Effect Transistor with Ultra Thin Gate Dielectrics
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Published:2006-03-08
Issue:3A
Volume:45
Page:1520-1524
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Lee Yao-Jen,Ho Pei-Tsang,Yang Wen-Luh,Chao Tien-Sheng,Huang Tiao-Yuan
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering