Low-Temperature Synthesis of Aluminium Nitride Film by HCD-Type Ion Plating
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 24 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Substrate biasing effects on the microstructure of magnetron-sputtered AlN films investigated by in situ reflectance interferometry;Thin Solid Films;2008-04
2. A study of highly c-axis oriented AlN films for diamond-based surface acoustic wave devices: Bulk structure and surface morphology;Sensors and Actuators A: Physical;2007-07
3. Growth and characterization of piezoelectric AlN thin films for diamond-based surface acoustic wave devices;Thin Solid Films;2006-02
4. Crystal size and oxygen segregation for polycrystalline GaN;Journal of Applied Physics;2002-09-15
5. Properties of graded TiCxNy coatings deposited by a low-temperature HCD ion coating technique;Surface and Coatings Technology;2001-06
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