Analysis of Wafer Bonding by Infrared Transmission
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A Model of a Trapped Particle Under a Plate Adhering to a Rigid Surface;Journal of Applied Mechanics;2013-07-12
2. Wafer-level assembly and sealing of a MEMS nanoreactor forin situmicroscopy;Journal of Micromechanics and Microengineering;2010-07-22
3. Trapped particle detection in bonded semiconductors using gray-field photoelastic imaging;EXP MECH;2005
4. Trapped particle detection in bonded semiconductors using gray-field photoelastic imaging;Experimental Mechanics;2005-10
5. Application of the narrow spectral range InAs-FPA-based IR camera for the investigation of the interface voids in silicon wafer bonding;Journal of Crystal Growth;2000-03
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