Electron-Beam-Induced Deposition of Pt for Field Emitter Arrays-Reference-Cited by-同舟云学术

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Electron-Beam-Induced Deposition of Pt for Field Emitter Arrays

Published:1996-12-30 Issue:Part 1, No. 12B Volume:35 Page:6623-6625
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Morimoto Hiroji,Kishimoto Takehisa,Takai Mikio,Yura Shinsuke,Hosono Akihiko,Okuda Soichiro,Lipp Stephan,Frey Lothar,Ryssel Heiner

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 20 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nano electron source fabricated by beam-induced deposition and its unique feature;Microelectronic Engineering;2015-01

2. Interfacial mixing and internal structure of Pt-containing nanocomposites grown by room temperature electron beam induced deposition;Journal of Applied Physics;2010-05-15

3. Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective;Nanotechnology;2009-08-26

4. Dual-beam focused ion beam/electron microscopy processing and metrology of redeposition during ion–surface 3D interactions, from micromachining to self-organized picostructures;Journal of Physics: Condensed Matter;2009-05-12

5. Gas-assisted focused electron beam and ion beam processing and fabrication;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2008

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