Narrow Trench Corrosion of Copper Damascene Interconnects-Reference-Cited by-同舟云学术

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Narrow Trench Corrosion of Copper Damascene Interconnects

Published:2002-12-15 Issue:Part 1, No. 12 Volume:41 Page:7338-7344
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Ernur Didem,Kondo Seiichi,Maex Karen

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/41/i=12R/a=7338/pdf

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3. Electrochemical study on metal corrosion in chemical mechanical planarization process;Japanese Journal of Applied Physics;2017-06-26

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