Author:
Miyashita Moriya,Kubota Hiroyasu,Matsushita Yoshiaki,Yoshimura Reiko,TsukasaTada
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
2 articles.
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1. Iron contamination in silicon technology;Applied Physics A: Materials Science & Processing;2000-05-01
2. Hydrogen Peroxide Decomposition in Ammonia Solutions;Journal of The Electrochemical Society;1999-09-01