Effect of Angular Distribution of Ejected Atoms from a Target on the Uniformity of Thickness and Composition of MoSixSputtering Films-Reference-Cited by-同舟云学术

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Effect of Angular Distribution of Ejected Atoms from a Target on the Uniformity of Thickness and Composition of MoSixSputtering Films

Published:1990-07-20 Issue:Part 1, No. 7 Volume:29 Page:1304-1309
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Yamazaki Toshinari,Matsuda Kenji,Nakatani Hideo

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 25 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Development of robust YSZ thin-film electrolyte by RF sputtering and anode support design for stable IT-SOFC;Ceramics International;2023-10

2. Properties of a new TiTaZrHfW( N) refractory high entropy film deposited by reactive DC pulsed magnetron sputtering;Surface and Coatings Technology;2023-06

3. Theoretical and Experimental Study of Particle Distribution from Magnetron Sputtering with Masks for Accurate Thickness Profile Control;Coatings;2020-04-05

4. YSZ Films Prepared by Reactive Magnetron Sputtering: Effect of the Thickness on the Electrical Properties;ECS Transactions;2013-10-06

5. Thickness Distribution of Metal Films by Magnetron Sputtering (II) ^|^mdash;Effect of the Distance between the Target and Substrate and the Erosion Distribution^|^mdash;;Journal of the Vacuum Society of Japan;2013

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