Calculation of Ion Sputtering Yield of Solid Sample with Cylindrical Cavities and Rectangular Trenches on the Surface
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Published:2001-02-28
Issue:Part 1, No. 2B
Volume:40
Page:965-967
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Bondarenko G. G.,Kristya V. I.,Prassitski V. V.
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering