Stoichiometric Change in Gallium Arsenide after Laser-Induced Thermochemical Etching

Author:

Tokuda Jun,Takai Mikio,Gamo Kenji,Namba Susumu

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Crystal growth of La2−xSrxCuO4−δ by the travelling-solvent floating-zone method;Journal of Crystal Growth;1994-04

2. Laser‐projection‐patterned etching of GaAs in a chlorine atmosphere;Journal of Applied Physics;1992-03-15

3. Recent developments in high-Tc single crystal growth in Japan: Bulk and thin film;Progress in Crystal Growth and Characterization of Materials;1992-01

4. Laser-Driven Etching;Thin Film Processes;1991

5. Laser-induced trench etching of GaAs in aqueous KOH solution;Applied Physics A Solids and Surfaces;1990-10

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