New Laser-Scan Exposure System for Delineating Precise Helical Patterns onto Sub-50-$\mu$m Wires
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Fabrication of Meshed Pipes with a Diameter of 100 µm and a Structure Composed of Fine Slit Arrays;IEEJ Transactions on Fundamentals and Materials;2020-08-01
2. Fabrication of Stent-Like Mesh Structures Using Synchronized Scan Rotation Lithography and Wet Etching;Journal of Photopolymer Science and Technology;2020-07-01
3. Laser-Scan Lithography and Electrolytic Etching for Fabricating Meshed Pipes of Stainless Steel;Journal of Photopolymer Science and Technology;2018-06-25
4. Laser-scan lithography and electrolytic etching for fabricating mesh structures on stainless-steel pipes 100 um in diameter;Photomask Technology;2017-10-16
5. Synchronous scan-projection lithography on overall circumference of fine pipes with a diameter of 2 mm;Japanese Journal of Applied Physics;2016-05-17
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