Multireflection Effect on Formation of Periodic Surface Structure on an Si Film Melting-Crystallized by a Linearly Polarized Nd:YAG Pulse Laser Beam
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference27 articles.
1. XeCl Excimer laser annealing used in the fabrication of poly-Si TFT's
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4. Two-Dimensionally Position-Controlled Excimer-Laser-Crystallization of Silicon Thin Films on Glassy Substrate
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1. Improving crystalline quality of polycrystalline silicon thin films crystallized on yttria-stabilized zirconia crystallization-induction layers by the two-step irradiation method of pulsed laser annealing;Japanese Journal of Applied Physics;2015-02-18
2. Effect of the crystallization-induction layer of yttria-stabilized zirconia on the solid state crystallization of an amorphous Si film;Japanese Journal of Applied Physics;2014-01-31
3. Raman spectral analysis of Si films solid-phase-crystallized on glass substrates using pulse laser with crystallization-induction layers of yttria-stabilized zirconia;Japanese Journal of Applied Physics;2014-01-01
4. Nano-strip grating lines self-organized by a high speed scanning CW laser;Nanotechnology;2011-03-16
5. Surface modification of an amorphous Si thin film crystallized by a linearly polarized Nd:YAG pulse laser beam;Journal of Applied Physics;2007-07
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