Substrate Position Dependence of Characteristics of Te–C:H Film Prepared by DC Magnetron Sputtering in Methane Atmosphere
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Published:1994-07-30
Issue:Part 1, No. 7B
Volume:33
Page:4486-4490
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Ohkawa Hideki,Ozawa Norio,Ichihara Katsutaro,Yasuda Nobuaki
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering