Affiliation:
1. Motorola Incorporated, Semiconductor Research and Development Laboratories, Phoenix, Arizona 85008
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
9 articles.
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1. Gettering in silicon photovoltaics: A review;Solar Energy Materials and Solar Cells;2022-01
2. Gettering Processes and the Role of Extended Defects;Advanced Silicon Materials for Photovoltaic Applications;2012-06-13
3. Evaluation of the effectiveness of back-side damage gettering in silicon introduced by a cavitating jet;Applied Physics Letters;2004-10-25
4. Iron contamination in silicon technology;Applied Physics A: Materials Science & Processing;2000-05-01
5. Gettering of Impurities;Metal Impurities in Silicon-Device Fabrication;1995