Author:
Toivola Yvete,Thurn Jeremy,Cook Robert F.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference25 articles.
1. The National Technology Roadmap for Semiconductors, p. 99, Semiconductor Industry Association, Santa Clara, CA (1997).
2. Low-Dielectric-Constant Materials for ULSI Interlayer-Dielectric Applications
3. Silsesquioxanes
4. Low-Dielectric Constant Materials–Synthesis and Applications in Microelectronics, Mater. Res. Soc. Symp. Proc.,381(1995).
5. Low-Dielectric Constant Materials II, Mater. Res. Soc. Symp. Proc.,443(1996).
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