Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Resistivity of boron‐doped polycrystalline silicon
2. Dopant segregation in polycrystalline silicon
3. K. Lee, H. Kang, Y. Jang, and S. Lim, inSolid-State Integrated Circuits Technology, Proceedings of the Fourth International Conference, Publishing House of Electronic Industry, p. 659 (1995).
4. J. E. Suarez, B. E. Johnson, and B. El-Kareh, inElectronic Components and Technology, Proceedings of the 41st Conference, IEEE, p. 537 (1991).
5. Effect of post-nitride-passivation processing on the long-term stability of polysilicon integrated circuit resistors
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Effect of Oxygen Plasma Surface Pretreatment on Silicon Based Dielectrics and Conductor Substrate;ECS Journal of Solid State Science and Technology;2016
2. Characteristics of silicon thin film thermistors;2008 5th International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology;2008-05