Affiliation:
1. Institute of Electronics, National Chiao Tung University, Hsinchu, Taiwan, China
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
6 articles.
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1. Dopants;Computational Microelectronics;2004
2. Investigation of Boron Diffusion from Polycrystalline Silicon;Journal of The Electrochemical Society;1986-10-01
3. Boron Diffusion Profile in Silicon and Data Analysis;Journal of The Electrochemical Society;1985-09-01
4. Boltzmann‐Matano Analysis of Boron Profiles in Silicon;Journal of The Electrochemical Society;1984-12-01
5. Average mobilities of carriers in subdoped silicon layers;Solid-State Electronics;1982-10