Affiliation:
1. Department of Electrical Engineering and Computer Sciences and the Electronics Research Laboratory, University of California, Berkeley, California 94720
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
9 articles.
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1. Improved alignment algorithm for electron beam lithography;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2014-11
2. High-Vacuum Growth and Processing Systems;Molecular Beam Epitaxy;1996
3. High contrast marks for e-beam direct write made by reactive ion etching;Microelectronic Engineering;1992-03
4. High Vacuum Growth and Processing Systems;Molecular Beam Epitaxy;1989
5. Radiation Exposure;Semiconductor Lithography;1988