Author:
Baek S. K.,Choi C. J.,Seong T. -Y.,Hwang H.,Kim H. K.,Moon D. W.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
5 articles.
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1. Nanoschichten;Nanotechnologie und Nanoprozesse;2016-05-13
2. Effects of High-Pressure Deuterium Annealing on Nonvolatile Memory Device with Silicon Nanocrystals Embedded in Silicon Nitride;Journal of The Electrochemical Society;2005
3. Effect of low-temperature preannealing on laser-annealed p+/n ultrashallow junctions;Applied Physics Letters;2002-04
4. Future technology for advanced MOS devices;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-01
5. Nanolayers;Nanotechnology and Nanoelectronics